Methods of selectively etching metal-containing materials from the surface of a substrate are described.
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5645645: method and apparatus for plasma treatment of a surface: july, 1997: zhang et al.
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The etch selectively removes metal-containing materials comparative to silicon-containing films s.
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5624582: optimisation of dry engraving through the mastery of helium bottom pressure: april, 1997: cain: 5599740: deposit-etch-deposit ozone/teos insulator bed method: february, 1997: jang et.
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5645645 essay 06
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